Sensing of the time-varying angular rate for MEMS Z-axis gyroscopes

Salah M. H. , McIntyre M. L. , Dawson D. M. , Wagner J. R. , Tatlicioglu E.

MECHATRONICS, vol.20, no.6, pp.720-727, 2010 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 20 Issue: 6
  • Publication Date: 2010
  • Doi Number: 10.1016/j.mechatronics.2010.07.001
  • Title of Journal : MECHATRONICS
  • Page Numbers: pp.720-727


In this paper, a nonlinear estimation strategy for sensing the time-varying angular rate of a Z-axis MEMS gyroscope is presented. An off-line adaptive least-squares estimation strategy is first developed to accurately estimate the unknown model parameters. Both axes of a Z-axis MEMS gyroscope are then actively controlled utilizing an on-line controller/observer to facilitate time-varying angular rate sensing. The proposed nonlinear estimation strategy is developed based on a Lyapunov-based analysis, which proves that the time-varying angular rate experienced by the device can be estimated accurately. Two cases for angular rate are investigated which are time-varying and constant magnitudes. An adaptive controller/observer was also utilized for sensing the angular rate to investigate the performance of the proposed controller/observer. Representative numerical results are discussed to demonstrate the performance of the proposed nonlinear strategy in accurately sensing the applied angular rate. Overall, the proposed nonlinear controller/observer improves sensing the constant angular rate by 50% and the time-varying angular rate by 90% when compared with an adaptive controller/observer. (C) 2010 Elsevier Ltd. All rights reserved.